[19p-P3-1~6] 9.3 Nanoelectronics

[19p-P3-5] In-Situ Observation of Electromigration-Induced Nanogap Formation by Atomic Force Microscopy

^○Mamiko Yagi¹, Ryutaro Suda¹, Takanari Saito¹, Jun-ichi Shirakashi¹ (Tokyo Univ. of Agr. & Tech.¹)

Keywords:ナノギャップ,エレクトロマイグレーション,原子間力顕微鏡法