[20a-A8-1~12] 5.3 Optical Control

△ [20a-A8-3] Effect of half-tone mask for Si-wire waveguide Fabricated on 300 mm SOI Wafer

^○Shu Hirano¹, Munetoshi Soma¹, Tomohiro Kita¹, Yuichiro Tanushi¹, Miyoshi Seki², Munehiro Toyama², Tsuyoshi Horikawa², Hirohito Yamada¹ (Tohoku Univ.¹, AIST²)

Keywords:シリコンフォトニクス