[28a-G10-1~11] 17.4 Device application

[28a-G10-11] Electric Transport and Resistance Reduction in Multilayer Graphene Interconnects

^○Hisao Miyazaki¹, Masayuki Katagiri¹, Yuichi Yamazaki¹, Mariko Suzuki¹, Naoshi Sakuma¹, Ryosuke Kusugi², Kazuya Imazeki², Kazuyoshi Ueno², Akihiro Kajita¹, Tadashi Sakai¹ (LEAP¹, Shibaura Inst. of Tech²)

Keywords:グラフェン、配線、インターカレーション