[28p-PB3-1~15] 6.2 Carbon-based thin films

[28p-PB3-10] Characterization of Carbon Thin Films Fabricated by Low-energy Electron Beam Irradiation on C2H2 Solid Films Condensed at Cryogenic Temperature

^○Naoki Kobayashi¹, Ryutaro Yamada¹, Tetsuya Sato¹, Kiyokazu Nakagawa¹ (Yamanashi Univ.¹)

Keywords:アモルファスカーボン、アセチレン、極低温