[30a-D3-1~13] 6.6 Probe microscopy

[30a-D3-13] Observing of Electrons Stored in NAND-Flash Memory by Using Nonlinear Dielectric Microscopy

^○Koichiro Honda¹, Yasuo Cho¹ (Tohoku Univ.¹)

Keywords:走査型非線形誘電率顕微鏡、Flashメモリ、蓄積電荷