The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

13. Semiconductors A (Silicon) » 13.4 Interconnection technology

[30p-G6-1~6] 13.4 Interconnection technology

Sat. Mar 30, 2013 1:30 PM - 3:00 PM G6 (B5 1F-2106)

[30p-G6-6] Reduction of sheet resistance of PtSi formed by Kr sputtering

Yasuhiko Yoshimura1, Xuiaopeng Wu1, Akihiro Yoshimi1, Jun Arima1, Shun-ichiro Ohmi1 (Tokyo Institute of Technology1)

Keywords:シリサイド、Kr