[17a-D6-1~11] 6.2 Carbon-based thin films

[17a-D6-5] Impedance frequency characteristic of amorphous carbon film having different optical properties

Hisashi Yoshioka¹, Xiaolong Zhou¹, Yasuyuki Nakaya¹, Satoru Arakawa¹, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, ^○Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:アモルファスカーボン膜,インピーダンス周波数特性,光学的特性