[17p-PG2-1~23] 6.3 Oxide-based electronics

[17p-PG2-6] Microstructure of sputtered-NiO films and their impacts on electrical properties

^○Tatsuya Iwata¹, Yusuke Nishi¹, Tsunenobu Kimoto¹ (Kyoto Univ.¹)

Keywords:酸化ニッケル,スパッタリング