[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-10] A Truly Compact LED induced Fluorescence Detection Module

^○Toshihiro Kamei¹, Keiko Sumitomo¹, Noriyuki Tsujimura¹, Takeshi Kobayashi¹, Ryutaro Maeda¹ (AIST¹)

Keywords:蛍光検出,MEMS