[19p-D8-1~13] 14.3 電子デバイス・プロセス技術

▲ [19p-D8-12] Interface state density, gate-control efficiency, and intrinsic transconductance of AlN/AlGaN/GaN metal-insulator-semiconductor devices

^○Hong-AnShih，MasahiroKudo，TuanQuyNguyen，Toshi-kazuSuzuki (Japan Advanced Institute of Science and Technology)

キーワード：MIS, interface state characterization