The 61st JSAP Spring Meeting, 2014

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Symposium planned by Program Committee » Creation of New Functional Materials by Wide-bandgap Oxide Semiconductors

[19p-E10-1~11] Creation of New Functional Materials by Wide-bandgap Oxide Semiconductors

Wed. Mar 19, 2014 1:15 PM - 5:45 PM E10 (E204)

4:30 PM - 4:45 PM

[19p-E10-8] Wide Band Gap Oxide TFT Fabricated by Open-Air Atmospheric Pressure Mist CVD

○Toshiyuki Kawaharamura1, Tadahiro Kaida2, Dapeng Wang2, Mamoru Furuta2,1 (Inst. for Nanotechnology, Kochi Univ. of Tech.1, Dept. of Env. Sci., Kochi Univ. of Tech.2)

Keywords:ミスト化学気相成長法,酸化物薄膜トランジスタ,ワイドバンドギャップ