Session information

Oral presentation

8 Plasma Electronics » 8.9 Plasma Electronics Award Speech

[14a-1F-1~2] 8.9 Plasma Electronics Award Speech

Mon. Sep 14, 2015 9:30 AM - 10:30 AM 1F (Reception Hall 1)

座長:豊田浩孝(名大)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:30 AM - 10:00 AM

[14a-1F-1] [Plasma Electronics Award Speech] Effect of Open Area Ratio and Pattern Structure on Fluctuations in Critical Dimension and Si Recess

〇Nobuyuki Kuboi¹, Tetsuya Tatsumi¹, Fukasawa Masanaga¹, Takashi Kinoshita¹, Jun Komachi¹, Hisahiro Ansai¹ (1.Sony Corporation)

10:00 AM - 10:30 AM

[14a-1F-2] [Plasma Electronics Award Speech] Plasma spray PVD of SiO nanocomposite negative electrode for lithium ion batteries

KEICHIRO HOMMA¹, 〇MAKOTO KAMBARA¹ (1.The Univ. of Tokyo)

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