The 76th JSAP Autumn Meeting, 2015

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Oral presentation

8 Plasma Electronics » 8.5 nanotechnology.

[16a-2Q-1~9] 8.5 nanotechnology.

Wed. Sep 16, 2015 9:00 AM - 11:15 AM 2Q (231-1)

座長:野崎 智洋(東工大)

10:15 AM - 10:30 AM

[16a-2Q-6] Analyses of Initial Stages of Graphene Growth in Plasma-Enhanced Chemical Vapor Deposition

〇(M1)Shunya Yamada1, Masahiro Kawano1, Kazuya Sano1, Yasuaki Hayashi1 (1.Kyoto Inst.Tech.)

Keywords:graphene