The 76th JSAP Autumn Meeting, 2015

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Oral presentation

8 Plasma Electronics » 8.5 nanotechnology.

[16a-2Q-1~9] 8.5 nanotechnology.

Wed. Sep 16, 2015 9:00 AM - 11:15 AM 2Q (231-1)

座長:野崎 智洋(東工大)

10:00 AM - 10:15 AM

[16a-2Q-5] Hexagonal BN atomic layer formation with plasma chemical transport – Carrier gas effect

〇Takeshi Kitajima1, Toshiki Nakano1 (1.Nat. Defense Acad.)

Keywords:h-BN,atomic layer,plasma