[12p-A18-1~18] 15.8 結晶評価，不純物・結晶欠陥

▲ [12p-A18-1] Formation of polycrystalline Silicon Layer on Quartz substrate by Aluminium-induced Crystallization

〇(M1)Joko Suwardy^{1, 2}, Wipakorn Jevasuwan¹, Kaoru Toko², Takashi Suemasu², Naoki Fukata^{1, 2} (1.National Institute for Materials Science, 2.Univ. of Tsukuba)

キーワード：silicon,crystallization