[12p-P10-1~8] 8.3 deposition of thin film and surface treatment

[12p-P10-1] Preparing of functional thin films by plasma process using powder target ~Depo. rate~

〇Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yuki Tanaka¹, Yoshiaki Suda¹ (1.Nat.l Ins. Tech., Sasebo Col.)

Keywords:Powder target