[12p-P10-1~8] 8.3 deposition of thin film and surface treatment

[12p-P10-6] Surface Treatment using Microwave Plasma for the Semiconductor Emitter of Thermionic Energy Converter

〇(M1)Kengo Inoue¹, Akihisa Ogino¹, Watanabe Takatoshi² (1.Graduate School of Engineering, Shizuoka Univ., 2.Shizuoka Univ.)

Keywords:semiconductor,thermionic emission