Yuta Suzuki

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

9:15 AM - 9:30 AM

[13a-D61-2] Evaluation of Projection Exposure System Using High-Intensity Light Emitting Diodes and Squared Optical Fibers

〇Yuta Suzuki¹, Jun Watanabe¹, Jun-ya Iwasaki¹, Toshiyuki Horiuchi¹ (1.Tokyo Denki Univ.)