13:45 〜 14:00 ▼ [13p-A21-2] Effect of Oxygen on Polarity and Crystalline Quality of AlN Films Deposited by Pulsed DC Reactive Sputtering 〇(M1)Noorprajuda Marsetio1、Makoto Ohtsuka1、Hiroyuki Fukuyama1 (1.Tohoku Univ.)