Noorprajuda Marsetio

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 1:15 PM - 6:00 PM A21 (Main Hall A)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[13p-A21-1~16] 15.4 III-V-group nitride crystals

1:45 PM - 2:00 PM

▼ [13p-A21-2] Effect of Oxygen on Polarity and Crystalline Quality of AlN Films Deposited by Pulsed DC Reactive Sputtering

〇(M1)Noorprajuda Marsetio¹, Makoto Ohtsuka¹, Hiroyuki Fukuyama¹ (1.Tohoku Univ.)