[13p-B8-1~10] Recent topics of point defects in semicondoctor crystals

[13p-B8-1] Current understanding of intrinsic point defects in semiconductor crystals

〇Ichiro Yonenaga¹ (1.Tohoku uNiv.)

Keywords:semiconductor, point defect

Current knowledge of formation of point defcts as vacancies and self-interstitials and their thermal equilibrium concentrations in semiconductors, especially in Si, is reviewed.