[20a-S222-1~11] 21.1 Joint Session K

[20a-S222-6] The influence of Al contents on the properties of orientation distribution and carrier transport of polycrystalline transparent conductive Al-doped ZnO films by direct current magnetron sputtering

〇Junichi Nomoto¹, Hisao Makino^1,2, Tetsuya Yamamoto¹ (1.Research Inst., Kochi Univ. Tech., 2.Kochi Univ. Tech.)

Keywords:Transparent conducting oxide,Zinc Oxide