The 63rd JSAP Spring Meeting, 2016

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[20p-H103-1~21] 6.2 Carbon-based thin films

Sun. Mar 20, 2016 1:15 PM - 7:00 PM H103 (H)

Masami Aono(National Defence Academy), Takako Nakamura(AIST), Atsuhito Sawabe(Aoyama Gakuin Univ.)

2:00 PM - 2:15 PM

[20p-H103-4] Fabrication of Vertical Diamond JFETs

〇taisuke suwa1, Takayuki Iwasaki1,2,3, Hiromitsu Kato3,4, Toshiharu Makino3,4, Masahiko Ogura3,4, Takeuchi Daisuke3,4, Satoshi Yamasaki3,4, Mutsuko Hatano1,2,3 (1.Titech, 2.ALCA, 3.CREST, 4.AIST)

Keywords:Diamond,FET,Vertical