2016年第63回応用物理学会春季学術講演会

講演情報

一般セッション(ポスター講演)

1 応用物理学一般 » 1.3 新技術・複合新領域

[21a-P3-1~12] 1.3 新技術・複合新領域

2016年3月21日(月) 09:30 〜 11:30 P3 (屋内運動場)

09:30 〜 11:30

[21a-P3-6] Investigation on the sensing mechanism and feasibility of ITO based liquid sensor

〇(M2)Lee Seok-hwan1、Chang JIho1,2、Jung Jung-Yeul3、Lee Moonjin4 (1.OST. KMOU.、2.Electronic Material Engineering.KMOU.、3.Offshore Plant Industries. KRISO.、4.Maritime Safety Research. KRISO.)

キーワード:Metal oxide,sensor,Indium Tin Oxide (ITO)

We proposed a new liquid sensor by using an Indium Tin Oxide (ITO) for the detection of hazardous noxious substances (HNS). Porous ITO layer was formed on a quartz substrate by a simple printing method subsequently characterized by using X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM). Sensor characteristics were tested at room temperature without additional heating process.
The resistance change (δR) was linearly correlated with the NH4OH concentration in the seawater solution as shown in the Fig. 1. The mechanism of sensor response has been discussed in terms of two reactions; one is the redox reaction, the other is the formation of electrical double layer (EDL) on the ITO layer surface. It revealed almost linear output signal up to the NH4OH concentrations of 15%. Sensitivity of the sensor showed small temperature dependency (dS/dT=0.083 %/oC) within 5~35oC range. Both results imply that ITO is a good candidate for liquid HNS sensor. In addition to that, to specify the chemical exactly, we confirmed the response of the ITO layer along with the pH of the solution.
In summary, we have investigated on the sensing mechanism and the feasibility of ITO based liquid sensor for the application to HNS detection.
This research was a part of the project titled 'Development of Management Technology for HNS Accident', funded by the Ministry of Oceans and Fisheries, Korea.