Tatsuhiro Ogawa

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8a-C21-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:15 AM - 9:30 AM

[8a-C21-1] Depth profiles for different atomic arrangements of As doped in Si crystal

〇(M1)Tatsuhiro Ogawa¹, Kotarou Natori¹, Takuya Hoshii¹, Masashi Nakatake², Yoshio Watanabe², Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹ (1.Tokyo Tech, 2.Aichi Synchrotron Radiation Center)

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