〇(M1)Tatsuhiro Ogawa¹, Kotarou Natori¹, Takuya Hoshii¹, Masashi Nakatake², Yoshio Watanabe², Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹ (1.Tokyo Tech, 2.Aichi Synchrotron Radiation Center)

〇(M2)Ryotaro Kiga¹, Masashi Uematsu^1,2, Kohei Itoh^1,2 (1.Keio Univ., 2.Keio Univ. TCAD Research and Development Center)

〇(D)Yuan Tu¹, Yasuo Shimizu¹, Masao Inoue², Yorinobu Kunimune³, Yasuhiro Shimada³, Toshiharu Katayama³, Takashi Ide³, Koji Inoue¹, Yasuyoshi Nagai¹ (1.IMR, Tohoku Univ., 2.Renesas Electronics Corp., 3.Renesas Semiconductor Manufacturing Co., Ltd.)

〇Jihee Jeon¹, Akihiro Suzuki^1,2, Kouta Takahashi^1,2, Osamu Nakatsuka^1,3, Shigeaki Zaima³ (1.Grad. Sch. of Eng., Nagoya Univ.,, 2.Research Fellow of JSPS, 3.IMaSS, Nagoya Univ.)

〇Kazuhiko Fuse¹, Hideaki Tanimura¹, Takayuki Aoyama¹, Shinichi Kato¹, Ippei Kobayashi¹ (1.SCREEN)

〇Shuichi Noda¹, Yosuke Tanimoto², Takuya Ozaki¹, Hideyuki Kurihara², Yasuyuki Hoshino², Kazuhiko Endo^1,3, Seiji Samukawa^1,2 (1.Tohoku Univ., 2.SHOWA DENKO, 3.AIST)

〇(M1)Kenta Kimoto¹, Norihisa Takei¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹, Hiromasa Ohmi¹ (1.Osaka Univ.)

〇Ryo Yokogawa^1,3, Shuichiro Hashimoto², Motohiro Tomita^1,2,4, Takanobu Watanabe², Atsushi Ogura¹ (1.Meiji Univ., 2.Waseda Univ., 3.JSPS Research Fellow DC, 4.JSPS Research Fellow PD)

〇(M1)Toshiki Nishimoto¹, Takashi Nakayama¹ (1.Chiba Univ.)

〇Akihiro Suzuki^1,2, Osamu Nakatsuka^1,3, Mitsuo Sakashita¹, Shigeaki Zaima³ (1.Grad. Sch. of Eng., Nagoya Univ., 2.Research Fellow of JSPS, 3.IMaSS, Nagoya Univ.)

〇(M1)Xuan Luo¹, Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)