Yuan Tu

Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8a-C21-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:45 AM - 10:00 AM

▼ [8a-C21-3] Effect of carbon on boron clustering and diffusion in silicon studied by atom probe tomography

〇(D)Yuan Tu¹, Yasuo Shimizu¹, Masao Inoue², Yorinobu Kunimune³, Yasuhiro Shimada³, Toshiharu Katayama³, Takashi Ide³, Koji Inoue¹, Yasuyoshi Nagai¹ (1.IMR, Tohoku Univ., 2.Renesas Electronics Corp., 3.Renesas Semiconductor Manufacturing Co., Ltd.)

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