Reo Kometani(Univ. of Tokyo), Hiroshi Mizuta(JAIST), Shinichi Ogawa(AIST)
Reo Kometani
Chairperson, etc.
Thu. Sep 7, 2017 1:45 PM - 6:00 PM C13 (office 2-2)
- Symposium (Oral)
- | Symposium
- | Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices
Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Reo Kometani(Univ. of Tokyo)