Reo Kometani

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Chairperson, etc.

Thu. Sep 7, 2017 1:45 PM - 6:00 PM C13 (office 2-2)

Symposium (Oral)
| Symposium
| Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices

[7p-C13-1~9] Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices

Reo Kometani(Univ. of Tokyo), Hiroshi Mizuta(JAIST), Shinichi Ogawa(AIST)

Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8a-C21-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Reo Kometani(Univ. of Tokyo)