Ryotaro Kiga

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8a-C21-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:30 AM - 9:45 AM

[8a-C21-2] Simultaneous observation of the diffusion of self-atoms and co-implanted boron and fluorine in silicon investigated by isotope heterostructures

〇(M2)Ryotaro Kiga¹, Masashi Uematsu^1,2, Kohei Itoh^1,2 (1.Keio Univ., 2.Keio Univ. TCAD Research and Development Center)