Kazuhiko Fuse

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8a-C21-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:15 AM - 10:30 AM

[8a-C21-5] Conformal Doping Technique for Shallow Junction Using Sol-Gel Coating and Flash Lamp Annealing

〇Kazuhiko Fuse¹, Hideaki Tanimura¹, Takayuki Aoyama¹, Shinichi Kato¹, Ippei Kobayashi¹ (1.SCREEN)