Akihiro Suzuki

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8a-C21-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:30 AM - 11:45 AM

△ [8a-C21-10] Influence of metal electrode on electrical property of metal/Si_xGe_1−x−ySn_y/Ge contact

〇Akihiro Suzuki^1,2, Osamu Nakatsuka^1,3, Mitsuo Sakashita¹, Shigeaki Zaima³ (1.Grad. Sch. of Eng., Nagoya Univ., 2.Research Fellow of JSPS, 3.IMaSS, Nagoya Univ.)