[7p-PA4-1~9] 8.5 Plasma nanotechnology

△ [7p-PA4-9] Correlation analysis of fluctuation of interactions between reactive plasmas and nanoparticles

〇Ren Zhou¹, Kento MORI¹, Hiroshi OHTOMO¹, Daisuke YAMASHITA¹, Hyunwoong SEO¹, Naho ITAGAKI¹, Kazunori KOGA¹, Masaharu SHIRATANI¹ (1.Kyushu Univ)

Keywords:plasma process, plasma turbulence, envelope analysis