1:30 PM - 3:30 PM
[21p-PB1-8] Graphene Film Formation by Microwave Surface Plasma Pulsing
Keywords:Graphene, plasma, pulse
Presentation information
Poster presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
[21p-PB1-1~18] 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Sep 21, 2018 1:30 PM - 3:30 PM PB (Shirotori Hall)