3:00 PM - 3:15 PM
△ [17p-C204-8] Numerical trajectory analysis of high-energy negative ion in magnetron plasma
Keywords:Magnetron sputtering, High Energy Particles, Negative oxygen ions
Presentation information
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and diagnostics
[17p-C204-1~20] 8.1 Plasma production and diagnostics
Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)
Kentaro Tomita(Kyushu Univ.)