The 65h JSAP Spring Meeting, 2018

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

[17p-C204-1~20] 8.1 Plasma production and diagnostics

Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)

Kentaro Tomita(Kyushu Univ.)

3:30 PM - 3:45 PM

△ [17p-C204-9] Mode mapping of inductively coupled plasma in terms of antenna current and voltage

〇(M2)Makato Moriyama1, Ivan Ganachev1,2, Keiji Nakamura1 (1.Chubu Univ., 2.Shibaura Mechatronics)

Keywords:Inductively coupled plasma, Mode transition, Simulation