Makato Moriyama

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[17p-C204-1~20] 8.1 Plasma production and diagnostics

3:30 PM - 3:45 PM

△ [17p-C204-9] Mode mapping of inductively coupled plasma in terms of antenna current and voltage

〇(M2)Makato Moriyama¹, Ivan Ganachev^1,2, Keiji Nakamura¹ (1.Chubu Univ., 2.Shibaura Mechatronics)