[17p-P8-1~24] 13.5 Semiconductor devices and related technologies

△ [17p-P8-16] Study of stacked type logic LSI with fabrication technology of 3D NAND flash memory.

〇Fumiya Suzuki¹, Shigeyoshi Watanabe¹ (1.Shonan Inst. of Tech)

Keywords:LSI, 3D NAND Flash memory, Logic circuit

Study of stacked type logic LSI with fabrication technology of 3D NAND flash memory has been described.Stacked type NAND/NAND logic for speed and low power operation has been presented. By using vertical connection method by the low-resistance poly-silicon manufacturing process and variable trench depth realization process high speed operation can be succesfully realized without sacrificing low fabrication cost.