[19p-P11-1~31] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19p-P11-5] Fabrication of ZnO thin films by a MOD method and influence of Drying temperature

〇Shota Kanmoto¹, Takanori Kozai¹, Shun Kamano², Weiwei Xu¹, Takeshi Fujihara¹, Tomoya Konishi¹, Tao Theng¹, Nobutomo Uehara³, Masato Omukai⁴, Masaru Kamano¹ (1.NIT,Anan college, 2.Tokushima Univ, 3.NIT, 4.NIT,Akashi college)

Keywords:MOD method, ZnO, thin films