Syunsuke Aizawa

→ Search for Syunsuke Aizawa in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 19, 2019 1:30 PM - 4:30 PM E318 (E318)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[19p-E318-1~10] 7.1 X-ray technologies

2:00 PM - 2:15 PM

[19p-E318-3] Concave Mo/Si Multilayer Mirror for High-Magnification EUV Microscopy

〇Syunsuke Aizawa^1,2, Toshiyuki Kakudate¹, Mitsunori Toyoda^1,2 (1.Tohoku Univ. IMRAM, 2.Tokyo polytechnic Univ.)

Fri. Sep 20, 2019 1:30 PM - 3:30 PM PB2 (PB)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication (Poster)

[20p-PB2-1~18] 7 Beam Technology and Nanofabrication (Poster)

1:30 PM - 3:30 PM

[20p-PB2-15] Optical Design of Concave Mo/Si Multilayer Mirror for EUV Illumination optics

〇Syunsuke Aizawa^1,2, Shuntaro Waki², Toshiyuki Kakudate¹, Mitsunori Toyoda^1,2 (1.Tohoku Univ. IMRAM, 2.Tokyo polytechnic Univ.)