The 68th JSAP Spring Meeting 2021

Presentation information

Print

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Kosuke Takenaka(Osaka Univ.), Keigo Takeda(Meijo Univ.)

10:00 AM - 10:15 AM

▲ [18a-Z17-5] High-speed Deposition of Graphite-like Carbon Film by Microwave Surface-Wave Plasma

〇Hansin BAE1, Kazuya Hikita1, Haruka Suzuki1,2, Kensuke Sasai2, Hirotaka Toyoda1,2,3 (1.Nagoya Univ., 2.cLPS, 3.NIFS)

Keywords:PECVD, Graphite-like Carbon, Microwave Suface-wave Plasma