The 68th JSAP Spring Meeting 2021

Kosuke Takenaka

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Chairperson, etc.

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Kosuke Takenaka(Osaka Univ.), Keigo Takeda(Meijo Univ.)