Oral presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)
Kosuke Takenaka(Osaka Univ.), Keigo Takeda(Meijo Univ.)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
9:00 AM - 9:15 AM
〇Kohshi Taguchi1, Ko Minoura1, Motohiro Yamahara1, Kazuyuki Noborio1 (1.Sakigake semiconductor Co., Ltd.)
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9:15 AM - 9:30 AM
〇Masanori Shinohara1, Tatsuo Nakai1, Ryo Sasamoto1, Satoshi Tanaka2, Takashi Matsumoto2 (1.Fukuoka Univ., 2.TTS)
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9:30 AM - 9:45 AM
〇Takayuki Ohta1, Jo Matsushima1, Akinori Oda2, Hiroyuki Kousaka3 (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)
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9:45 AM - 10:00 AM
〇Ryota Nishimura1, Hirotaka Mitamura1, Hiroyuki Yoshiki1, Hiroyuki Arafune1 (1.Tsuruoka Kosen)
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10:00 AM - 10:15 AM
〇Hansin BAE1, Kazuya Hikita1, Haruka Suzuki1,2, Kensuke Sasai2, Hirotaka Toyoda1,2,3 (1.Nagoya Univ., 2.cLPS, 3.NIFS)
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10:30 AM - 10:45 AM
〇Naoto Komatsu1, Atsuhisa Togo1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)
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10:45 AM - 11:00 AM
〇Hiromichi Nakatsuka1, Rei Tanaka1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)
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11:00 AM - 11:15 AM
〇(M1)Takuro Sekido1, Takuhiro Ando1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)
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11:15 AM - 11:30 AM
〇Takuhiro Ando1, Takuro Sekido1, Hiroaki Kakiuchi1, Kiyoshi yasutake1, Hiromasa Ohomi1 (1.Osaka Univ.)
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11:30 AM - 11:45 AM
〇Yuuto Kawato1, Taisei Motomura2, Tatsuo Tabaru2, Masato Uehara2, Tetsuya Okuyama1 (1.NIT Kurume College, 2.AIST)
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11:45 AM - 12:00 PM
〇Tsuyoshi Otani1, Hidehiko Yoda2 (1.AIOT, 2.Utsunomiya Univ.)
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