Naoto Komatsu

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:30 AM - 10:45 AM

△ [18a-Z17-6] Synthesis property of diamond by water vapor added microwave hydrogen plasma induced chemical transport

〇Naoto Komatsu¹, Atsuhisa Togo¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹, Hiromasa Ohmi¹ (1.Osaka Univ.)