Masanori Shinohara

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 9:00 AM - 12:00 PM Z17 (Z17)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-Z17-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:15 AM - 9:30 AM

[18a-Z17-2] Effects of the substrate and source position on the chemical bonding states of the film deposited with benzene plasma

〇Masanori Shinohara¹, Tatsuo Nakai¹, Ryo Sasamoto¹, Satoshi Tanaka², Takashi Matsumoto² (1.Fukuoka Univ., 2.TTS)