11:15 AM - 11:30 AM
△ [19a-Z33-9] Effect of excess Cl2 supply on HVPE growth of β-Ga2O3 by GaCl-O2 system
Keywords:HVPE, Ga2O3, GaCl3
In halide vapor phase epitaxy of β-Ga2O3 by GaCl-O2 system, powder formation of Ga2O3 in the vapor phase hinders epitaxial growth, since the change of the Gibbs energy of formation is very learge. In this study, effect of excess chlorin supply on the powder formation is investigated.