[21a-B200-3~3] 8.7 Plasma Electronics Invited Talk

[21a-B200-3] [INVITED] Challenges in Plasma Processes aiming to realize the Sustainable and Resilient Society

〇Sumie Segawa¹ (1.Tokyo Electron Limited)

Keywords:semiconductor, environment, sustainability

In semiconductor manufacturing, it has been reported that CO2 emissions from the manufacturing process account for more than 70% of the CO2 emissions of semiconductor manufacturers, and the problem of energy and resource consumption in dry process equipment is particularly high. From the viewpoint of CO2 emissions, in addition to technological innovation to reduce all the utilities consumption converted, drastic measures are also required due to concerns about PFAS regulations as its huge business impacts. I would like to introduce the challenges toward Net Zero in 2050 and discuss the future of semiconductor manufacturing technology.