Sumie Segawa

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 10:15 AM - 11:00 AM B200 (B200)

Oral presentation
| 8 Plasma Electronics
| 8.7 Plasma Electronics Invited Talk

[21a-B200-3~3] 8.7 Plasma Electronics Invited Talk

10:15 AM - 11:00 AM

[21a-B200-3] [INVITED] Challenges in Plasma Processes aiming to realize the Sustainable and Resilient Society

〇Sumie Segawa¹ (1.Tokyo Electron Limited)