[21p-A101-1~16] 3.10 Photonic structures and phenomena (formerly 3.11)

[21p-A101-5] Fabrication of GaN Topological Photonic Crystal Membranes by Combination Process of HEATE and Wet Etching

〇Taiju Kudo¹, Koji Yoneta¹, Yamato Takano¹, Umito Kurabe¹, Akihiko Kikuchi^1,2,3 (1.Sophia Univ., 2.Sophia Photonics Research Center., 3.Sophia Semiconductor Research Institute.)

Keywords:Topological Photonic Crystal

We have been studying the hydrogen atmosphere anisotropic thermal etching (HEATE) method, a low-damage etching technique utilizing thermal decomposition of GaN in a hydrogen atmosphere, in order to develop highly functional GaN-based PhC in the visible light range. In this report, we have found HEATE conditions that enable formation of highly perpendicular nanoholes and report the results of applying the technique to the fabrication of GaN-based topological PhC membranes.