The 83rd JSAP Autumn Meeting 2022

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[23a-C101-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

Fri. Sep 23, 2022 9:00 AM - 12:15 PM C101 (C101)

Haruhiko Udono(Ibaraki Univ.), Hirokazu Tatsuoka(Shizuoka Univ.)

9:15 AM - 9:30 AM

△ [23a-C101-2] Fabrication and evaluation of BaSi2 films on Si3N4 insulators for thermoelectric applications

〇Kazuki Kido1, Hayato Hasebe1, Yoichiro Koda2, Masami Mesuda2, Kaoru Toko1, Takashi Suemasu1 (1.Univ. Tsukuba, 2.Tosoh Corp.)

Keywords:BaSi2, Sputtering, thermoelectric applications